Flexible piezoelectric sensor based on ATO/BNT multi-layers with high sensitivity, thermal healing and driving performance

Flexible piezoelectric sensors are widely used in energy harvesting and sensing, illustrating the potential applications in self-driving wearable devices. However, the self-healing sensors by light and heat can effectively solve the problem of damage in practical applications. Therefore, the thermally healing piezoelectric sensors with different multilayers integrating the ATO electrode film and BNT piezoelectric film are proposed and investigated, which can use natural resources (under sunlight) to repair its defects. It also has a high sensitivity of 2.09 V·kPa−1, a fast response time of 66 ms, a maximum output voltage of 61 V and an output power of 30 μW. The results show that the PES has great potential in future applications.