栅栏
材料科学
绝缘体上的硅
光学
闪耀光栅
制作
耦合损耗
衍射光栅
光电子学
带宽(计算)
垂直的
硅
光纤
物理
电信
病理
医学
替代医学
计算机科学
数学
几何学
作者
Jinbin Xu,Sipan Yang,Liying Wu,Liping Xu,Yaqian Li,Rujun Liao,Minni Qu,Xueling Quan,Xiulan Cheng
出处
期刊:Optics Express
[Optica Publishing Group]
日期:2021-12-02
卷期号:29 (26): 42999-42999
被引量:22
摘要
A high-performance binary blazed grating coupler (BBGC) on a silicon-on-insulator (SOI) platform for perfectly vertical coupling has been proposed. The period and the etching depth of the grating and the fill factors of the sub-gratings are simulated optimally with manufacturable feature sizes, and the coupling efficiency (CE) is as high as −1.78 dB at 1550 nm with a broad 3-dB bandwidth of around 100 nm. Then, a BBGC with the CE of −3.69 dB at 1550.5 nm and a 3-dB bandwidth of about 70 nm was experimentally demonstrated. Moreover, a large process tolerance of about 20 nm on the narrower sub-grating width was proved, achieving the insertion loss lower than −4.64 dB at 1550 nm. The realization of the BBGC on a SOI platform is simple, repeatable, and compatible with standard complementary metal-oxide semiconductor (CMOS) technology.
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