材料科学
光刻
导电体
导线
光电子学
纳米技术
制作
电子线路
弹性体
平版印刷术
纳米复合材料
激光器
复合材料
光学
电气工程
医学
替代医学
物理
病理
工程类
作者
Sung-Chan Song,Hyejun Hong,Kyung Yeun Kim,Kyun Kyu Kim,Jaewoo Kim,Daeyeon Won,Shi Yun,Jae Weon Choi,Young-In Ryu,Kyung-Woo Lee,Jaeho Park,Joohyuk Kang,Junhyuk Bang,Hyunseon Seo,Yu-Chan Kim,Daeho Lee,Haechang Lee,Jun Young Lee,Suk Won Hwang,Seung Hwan Ko,Hojeong Jeon,Wonryung Lee
出处
期刊:ACS Nano
[American Chemical Society]
日期:2023-10-19
卷期号:17 (21): 21443-21454
标识
DOI:10.1021/acsnano.3c06207
摘要
Photolithography is a well-established fabrication method for realizing multilayer electronic circuits. However, it is challenging to adopt photolithography to fabricate intrinsically stretchable multilayer electronic circuits fully composed of an elastomeric matrix, due to the opacity of thick stretchable nanocomposite conductors. Here, we present photothermal lithography that can pattern elastomeric conductors and via holes using pulsed lasers. The photothermal-patterned stretchable nanocomposite conductor exhibits 3 times higher conductivity (5940 S cm-1) and 5 orders of magnitude lower resistance change (R/R0 = 40) under a 30% strained 5000th cyclic stretch, compared to those of a screen-printed conductor, based on the percolation network formed by spatial heating of the laser. In addition, a 50 μm sized stretchable via holes can be patterned on the passivation without material ablation and electrical degradation of the bottom conductor. By repeatedly patterning the conductor and via holes, highly conductive and durable multilayer circuits can be stacked with layer-by-layer material integration. Finally, a stretchable wireless pressure sensor and passive matrix LED array are demonstrated, thus showing the potential for a stretchable multilayer electronic circuit with durability, high density, and multifunctionality.
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