拉尼奥
材料科学
薄膜
双层
图层(电子)
基质(水族馆)
化学工程
沉积(地质)
复合材料
纳米技术
铁电性
电介质
光电子学
化学
古生物学
工程类
地质学
海洋学
膜
生物
生物化学
沉积物
作者
Rintaro Ashihara,Masami Kawahara,Hiroyuki Okazaki,Shunya Yamamoto,Takeshi Kawae
标识
DOI:10.2109/jcersj2.24021
摘要
We investigated the relationship between the self-orientation and process conditions of self-oriented LaNiO 3 (LNO) thin films fabricated by a chemical solution deposition method.The LNO thin films were deposited on Pt-coated Si, SiO 2 /Si, glass, c-plane sapphire, and stainless-steel substrates, which have crystal structures different from that of LNO.Increasing the heating rate during the transition from 200 °C (pre-heating) to 380 °C (pyrolysis) enhanced the self-orientation of the resulting LNO thin films.The LNO thin films deposited on the various substrate materials exhibited (h00) self-oriented growth because Pb(Zr 0.52 Ti 0.48 )O 3 (PZT) thin films deposited on the selforiented LNO thin films clearly adopted the (h00) preferential orientation.As a unique behavior of PZT/LNO bilayer structures, the PZT upper layer has stronger (h00) oriented growth than that of the underlying self-oriented LNO layer.
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