材料科学
涂层
复合数
陶瓷
韧性
复合材料
脆性
物理气相沉积
溅射沉积
烧结
相(物质)
合金
溅射
冶金
薄膜
纳米技术
有机化学
化学
作者
Jiayi He,Xuexia Lan,Jinquan Wan,Huanlong Liu,Zhongwu Liu,Dongling Jiao,Xichun Zhong,Yitian Cheng,Wenhui Qiu
标识
DOI:10.1016/j.apsusc.2021.149025
摘要
High-performance cutting tools require hard yet tough coatings. Physical vapor deposited CrN ceramic coatings exhibit great hardness but also high brittleness. Introducing metal phase to form Cr/CrN composite structure is effective to enhance their toughness. However, high cost hot-pressed Cr targets and narrow processing window of coating deposition limit the application of Cr/CrN composite coatings. In this work, up to 20 at.% Fe was selected to alloy with Cr in the target, aiming at simultaneously facilitating the HP process and modifying the Cr/CrN composite structure. With the help of Fe, dense targets with relative densities beyond 98% can be fabricated at the low sintering temperature of 1100 °C, 100 °C lower than that for pure Cr target. With the Cr-Fe targets, Cr(Fe)/(Cr,Fe)N composite coatings were deposited by magnetron sputtering under a N2/Ar mixed atmosphere. The hardness of coating increases from 7.26 to 11.27 GPa when Fe content in target increases from 0 to 5 at.%, due to the solution strengthening. The toughness of coating is also enhanced because of the increased amount of Cr(Fe) phase. Cr(Fe) and (Cr,Fe)N in the coating display a “pearlite-like” distribution, and in this structure, the Cr(Fe) phase is helpful to crack bridging and strain relaxation.
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