The development of micro-gyroscope technology

This review reports an overview and development of micro-gyroscope. The review first presents different types of micro-gyroscopes. Micro-gyroscopes in this review are categorized into Coriolis gyroscope, levitated rotor gyroscope, Sagnac gyroscope, nuclear magnetic resonance (NMR) gyroscope according to the working principle. Different principles, structures, materials, fabrications and control technologies of micro-gyroscopes are analyzed. This review compares different classes of gyroscopes in the aspects such as fabrication method, detection axis, materials, size and so on. Finally, the review evaluates the key technologies on how to improve the precision and anti-jamming ability and to extend the available applications of the gyroscopes in the market and patents as well.