气泡
机械
空化
半径
声学
压缩性
粒子(生态学)
动力学(音乐)
驻波
材料科学
物理
地质学
计算机科学
计算机安全
海洋学
作者
Naoya Ochiai,Jun Ishimoto
出处
期刊:ECS transactions
[The Electrochemical Society]
日期:2013-08-31
卷期号:58 (6): 77-85
标识
DOI:10.1149/05806.0077ecst
摘要
The clarification of the mechanism and the control of a megasonic cleaning are necessary for the megasonic cleaning without pattern damage. In the present study, the numerical analysis of the bubble behavior in a megasonic field is performed to clarify the mechanism of the particle removal of megasonic cleaning. The bubble behavior in the standing wave of a megasonic wave is analysed using a compressible locally homogeneous model of a gas-liquid two-phase medium. The results show that the present numerical method is found to can simulate the characteristic of the bubble translational motion in a standing wave that the direction of the movement due to the primary Bjerknes force changes at the resonant radius. And the calculated wall pressure is higher than the exposed megasonic pressure, and the cavitation is confirmed to influence the particle removal of megasonic cleaning.
科研通智能强力驱动
Strongly Powered by AbleSci AI