Controllable Fabrication of Two-Dimensional Patterned VO2 Nanoparticle, Nanodome, and Nanonet Arrays with Tunable Temperature-Dependent Localized Surface Plasmon Resonance

A universal approach to develop various two-dimensional ordered nanostructures, namely nanoparticle, nanonet and nanodome arrays with controllable periodicity, ranging from 100 nm to 1 μm, has been developed in centimeter-scale by nanosphere lithography technique. Hexagonally patterned vanadium dioxide (VO2) nanoparticle array with average diameter down to sub-100 nm as well as 160 nm of periodicity is fabricated, exhibiting distinct size-, media-, and temperature-dependent localized surface plasmon resonance switching behaviors, which fits well with the predication of simulations. We specifically explore their decent thermochromic performance in an energy saving smart window and develop a proof-of-concept demo which proves the effectiveness of patterned VO2 film to serve as a smart thermal radiation control. This versatile and facile approach to fabricate various ordered nanostructures integrated with attractive phase change characteristics of VO2 may inspire the study of temperature-dependent physical responses and the development of smart devices in extensive areas.