石墨烯
材料科学
薄脆饼
薄板电阻
化学气相沉积
光电子学
微晶
蓝宝石
纳米技术
电子迁移率
外延
碳化硅
单层
复合材料
图层(电子)
冶金
物理
光学
激光器
作者
Zhaolong Chen,Chunyu Xie,Wendong Wang,Jinpei Zhao,Bingyao Liu,Jingyuan Shan,Xueyan Wang,Min Hong,Li Lin,Huang Li,Xiuping Lin,Shenyuan Yang,Xuan Gao,Yanfeng Zhang,Peng Gao,Kostya S. Novoselov,Jingyu Sun,Zhongfan Liu
出处
期刊:Science Advances
[American Association for the Advancement of Science]
日期:2021-11-19
卷期号:7 (47)
被引量:43
标识
DOI:10.1126/sciadv.abk0115
摘要
Direct chemical vapor deposition (CVD) growth of wafer-scale high-quality graphene on dielectrics is of paramount importance for versatile applications. Nevertheless, the synthesized graphene is typically a polycrystalline film with high density of uncontrolled defects, resulting in a low carrier mobility and high sheet resistance. Here, we report the direct growth of highly oriented monolayer graphene films on sapphire wafers. Our growth strategy is achieved by designing an electromagnetic induction heating CVD operated at elevated temperature, where the high pyrolysis and migration barriers of carbon species are easily overcome. Meanwhile, the embryonic graphene domains are guided into good alignment by minimizing its configuration energy. The thus obtained graphene film accordingly manifests a markedly improved carrier mobility (~14,700 square centimeters per volt per second at 4 kelvin) and reduced sheet resistance (~587 ohms per square), which compare favorably with those from catalytic growth on polycrystalline metal foils and epitaxial growth on silicon carbide.
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