Spark assisted chemical engraving

These Ecole polytechnique federale de Lausanne EPFL, n° 2776 (2003)Section de microtechniqueFaculte des sciences et techniques de l'ingenieurInstitut de microtechniqueLaboratoire de systemes robotiques - communJury: Christos Comninellis, Patrik Hoffmann, Max-Olivier Hongler, Hans Langen, Hans Siegenthaler, Velizar Stankovic Public defense: 2003-6-13 Prix du Professeur Rene Wasserman - Professor Rene Wasserman award, 2004 Reference doi:10.5075/epfl-thesis-2776Print copy in library catalog Award: http://vpaa.epfl.ch/page14979.html Record created on 2005-03-16, modified on 2017-05-10