压阻效应
毫秒
材料科学
背景(考古学)
数码产品
灵敏度(控制系统)
微电子机械系统
可扩展性
纳米技术
制作
计算机科学
单晶硅
电子工程
光电子学
硅
电气工程
工程类
物理
病理
古生物学
生物
数据库
医学
替代医学
天文
作者
Sang Min Won,Heling Wang,Bong Hoon Kim,KunHyuck Lee,Hokyung Jang,Kyeongha Kwon,Mengdi Han,Kaitlyn E. Crawford,Haibo Li,Yechan Lee,Xuebo Yuan,Sung Bong Kim,Yong Suk Oh,Woo Jin Jang,Jong Yoon Lee,Seungyong Han,Jeonghyun Kim,Xueju Wang,Zhaoqian Xie,Yihui Zhang,Yonggang Huang,John A. Rogers
出处
期刊:ACS Nano
[American Chemical Society]
日期:2019-05-24
卷期号:13 (10): 10972-10979
被引量:132
标识
DOI:10.1021/acsnano.9b02030
摘要
Sensors that reproduce the complex characteristics of cutaneous receptors in the skin have important potential in the context of artificial systems for controlled interactions with the physical environment. Multimodal responses with high sensitivity and wide dynamic range are essential for many such applications. This report introduces a simple, three-dimensional type of microelectromechanical sensor that incorporates monocrystalline silicon nanomembranes as piezoresistive elements in a configuration that enables separate, simultaneous measurements of multiple mechanical stimuli, such as normal force, shear force, and bending, along with temperature. The technology provides high sensitivity measurements with millisecond response times, as supported by quantitative simulations. The fabrication and assembly processes allow scalable production of interconnected arrays of such devices with capabilities in spatiotemporal mapping. Integration with wireless data recording and transmission electronics allows operation with standard consumer devices.
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