Abstract Thioxanthone sulfonate photoacid generators (PAGs) for super acid sensitive to UVA were synthesized using thioxanthone derivatives with perfluoroalkyl sulfonate units with good thermal stability (over 240℃). The PAGs exhibited good photoreactivity with photoacid generation quantum yields ( Φ a ) between 0.10 to 0.14, and well utilized the energy of the UV-LED at 365, 385 and 395 nm.