光纤激光器
激光器
光学
材料科学
光电子学
紫外线
可调谐激光器
物理
作者
Jinhai Zou,Jin Li,Tianran Li,Yongjun Huang,Qiujun Ruan,Yanbo Dou,Zhengqian Luo
标识
DOI:10.1109/jlt.2022.3152306
摘要
Deep ultraviolet (DUV) lasers are essential elements to versatile applications such as spectroscopy and lithography, and several techniques including free-electron lasers, excimer lasers and high-order harmonic conversion have been developed for DUV laser generation, yet the wavelength tunability and compactness are still challenging. Here, for the first time, we experimentally demonstrate a compact tunable continuous-wave (CW) DUV laser source by direct intracavity frequency doubling of visible fiber lasers. Efficient green/yellow laser emission is enabled by the down-conversion in the Ho $^{3+}$ - or Dy $^{3+}$ -doped ZBLAN fibers while the miniaturized cavity consists of a home-made fiber pigtail mirror and diffraction grating. The second harmonic generation from visible to ultraviolet is subsequently implemented by utilizing a BBO module intracavity. The achieved CW DUV lasers yield wavelength tuning range of 269.5-275.4 nm and 283.6-289.9 nm in the presence of an ultra-narrow linewidth of $< $ 0.025 nm. The produced power at 272.6 nm reaches 1.36 mW and a maximum visible-to-DUV efficiency of 5.3‰ is estimated with the green laser excitation. Our work therefore provides new possibilities for the realization of a new class of compact, wavelength tunable, and cost-effective CW DUV laser sources.
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