Development of High-precision RF Sensor

Because radio frequency (RF) sensors typically experience interference between their capacitive detector and inductive detector, it becomes difficult for them to precisely measure voltage and current waveforms.We developed a high-precision RF sensor by using novel double walls (NDWs), which can minimize the interference.The geometrical construction variables of the NDWs are determined by analyzing the results from three-dimensional electro-magnetic simulation.The phase difference between voltage and current waveforms for the designed RF sensor is approximately 1.32° at a matched load, and that for an ENI probe (VIP1004) is 24.78°, as a result of which the developed RF sensor has better performance in preventing such interferences, compared with the other commercial sensor.