FDTD analysis for the minimum measurement field of view required for imaging ellipsometry

Abstract Imaging ellipsometry, which combines single-point measurement ellipsometry with optical microscopy, is distinguished by its ability to evaluate thin films surfaces. Higher spatial resolution of the imaging system of the imaging ellipsometer enables more detailed inspection of thin films. In this note, we analyze the minimum measurement field of view required for thin film evaluation using the finite-difference time-domain method. This requirement is particularly critical for assessing the performance of an imaging ellipsometer with high spatial resolution.