材料科学
肖特基势垒
微波食品加热
光电子学
肖特基二极管
阳极
二极管
蚀刻(微加工)
表面状态
无线电频率
宽禁带半导体
氮化镓
曲面(拓扑)
电极
纳米技术
图层(电子)
化学
电气工程
物理
物理化学
工程类
量子力学
数学
几何学
作者
Dudekula Shaikshavali,D. Kannadassan
标识
DOI:10.1080/09205071.2021.1956374
摘要
In this paper, we have presented the influence of surface traps/states on RF and microwave performance of fully recessed Schottky anode AlGaN/GaN lateral Schottky barrier diode (L-SBD) using numerical modeling and simulation. During the etching/treatment of AlGaN or GaN surface, the surface traps are induced, whose physical modeling is proposed here. Through this study, the physical insights on the influence of surface states, near the 2DEG, on the DC and RF/microwave performance of the L-SBDs are presented. It was observed that induced donor states due to etching for recessed anode significantly affect the Schottky barrier and modify the tunneling behavior of anode/GaN interface. This influences the DC and RF/microwave characteristics of L-SBDs, which enhances the cut-off frequency of >140 GHz and high detector sensitivity of βV >1000 mV/mW.
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