材料科学
聚四氟乙烯
磷化氢
电极
电化学气体传感器
电化学
参比电极
电化学电池
膜
薄膜
溅射
工作电极
化学工程
气体扩散
分析化学(期刊)
复合材料
纳米技术
催化作用
色谱法
有机化学
物理化学
化学
生物化学
工程类
作者
Chang‐Yeoul Kim,Hyo-Hee Lee
标识
DOI:10.1166/jnn.2020.17613
摘要
Phosphine gas is a toxic and flammable gas, which are useful dopant in the semiconducting industry. OSAH (Occupational Safety and Health Administration) regulates the threshold limit value as 0.3 ppm. To detect phosphine gas, an electrochemical sensor cell using gold as a working electrode is available. In this paper, we prepared Au thin film electrode on porous PTFE (polytetrafluoroethylene) membrane by using d.c. sputtering machine. Au thin film deposited on PTFE membrane for 300 s showed the thickness about 220 nm and electrical resistance between 5 and 10 ohm. We adopted this Au thin film as a working electrode and reference electrode. The sensitivity of the electrochemical cell is about 3000 nA/ppm for phosphine gas. Using Cottrell equation and COMSOL program, we simulated the diffusion coefficient of phosphine gas within the electrochemical cell, which showed the value of 1.21×10 −7 m 2 /s.
科研通智能强力驱动
Strongly Powered by AbleSci AI