聚二甲基硅氧烷
材料科学
电容
液态金属
电极
制作
电容感应
压力传感器
共晶体系
光电子学
基质(水族馆)
分析化学(期刊)
纳米技术
复合材料
电气工程
化学
合金
医学
替代医学
海洋学
工程类
物理化学
病理
色谱法
地质学
物理
热力学
作者
S. Ali,Dinesh Maddipatla,Binu B. Narakathu,Amer A. Chlaihawi,Ebrahim Sepehr,Farah Janabi,Bradley J. Bazuin,Massood Z. Atashbar
出处
期刊:IEEE Sensors Journal
[Institute of Electrical and Electronics Engineers]
日期:2019-01-01
卷期号:19 (1): 97-104
被引量:60
标识
DOI:10.1109/jsen.2018.2877929
摘要
A novel flexible pressure sensor, based on polydimethylsiloxane (PDMS) and eutectic gallium-indium (EGaIn) liquid metal, was developed for detecting various applied pressures. The sensor was fabricated with PDMS polymer-based electrode channels that are filled with EGaIn liquid metal. The liquid metal-based electrodes were designed to form four capacitors (C1, C2, C3, and C4). Conventional printed circuit board technology was used to manufacture the master mold to form the PDMS-based electrode channels. Corona discharge treatment was employed to bond the PDMS layers at room temperature, under atmospheric pressure. The capability of the fabricated pressure sensor was demonstrated by investigating the capacitive-based response of the device for varying applied pressures. Average capacitance changes ranging from 2.3% to 12.0%, 2.6% to 11.8%, 2.5% to 12.2%, and 2.7% to 13.1% when compared with the based capacitance of 14.1, 15.1, 13.8, and 13.3 pF were obtained for C1, C2, C3, and C4, respectively, for applied pressures ranging from 0.25 to 1.10 MPa. A linear relationship was obtained for the average capacitance change with a sensitivity of 0.11%/MPa and a correlation coefficient of 0.9975. The results obtained thus demonstrate the feasibility of employing liquid metal-based electrodes for the fabrication of flexible pressure sensing devices.
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