A Novel Ultrasonic Elliptical Vibration Device for Micro/Nano Manipulation

This paper presents the design and characteristic analysis of a novel ultrasonic elliptical vibration device for micro/nano manipulation. The elliptical vibration device is composed of two sandwich piezoelectric transducers in parallel. A prototyped elliptical vibration device is fabricated and experimental investigations are conducted to further test its characteristics. The results show that the resonant frequencies of the two transducers are 95.8 kHz and 96.4 kHz, respectively, and 96 kHz is selected as the operating frequency of the device. The device is proven to vibrate along an elliptical trajectory in the vertical plane, and the size and aspect ratio of the vibration ellipse can be adjusted for the requirements of manipulation.