吸附
腐蚀
化学机械平面化
化学
X射线光电子能谱
分子
钨
朗缪尔吸附模型
介电谱
无机化学
接触角
分子轨道
轨道能级差
缓蚀剂
电化学
材料科学
化学工程
物理化学
有机化学
图层(电子)
复合材料
电极
工程类
作者
Ranjith Punathil Meethal,Palwasha Jalalzai,Muskan,Sumit Kumar,Jerome Peter,Andreas Klipp,Tae-Gon Kim,Jin-Goo Park
标识
DOI:10.1016/j.jcis.2023.04.012
摘要
The cleaning solution for the post-chemical mechanical planarization (post-CMP) process of tungsten in neutral-alkaline media requires corrosion inhibitors as an additive, especially for advanced devices where the device node size shrinks below 10 nm. In the present study, the corrosion inhibition performance of benzethonium chloride (BTC) is evaluated in neutral-alkaline conditions. The electrochemical impedance spectroscopy (EIS) analysis showed ∼ 90 % of corrosion inhibition efficiency with an optimum concentration of 0.01 wt% BTC at both pH 7 and 11. Langmuir adsorption isotherm, frontier molecular orbital theory, molecular simulation, contact angle, precipitation study, and X-ray photoelectron spectroscopy analysis were performed to identify the inhibition mechanism of the BTC molecule on the W surface. Based on the proposed mechanism, the electrostatic attraction between the positively charged N atom in the BTC molecule and the negatively charged W surface initiates the adsorption of the molecule. The high dipole moment and large molecular size enhance the physical adsorption of the molecule to the surface. In addition to this, the adsorption isotherm analysis shows that possible chemical interaction with a moderate value of Gibbs free energy change of adsorption exists between the W and BTC molecule. The excellent corrosion inhibition efficiency of BTC on W is confirmed by the frontier molecular orbital theory and molecular dynamic simulation analysis.
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