Improvement of the quality factor of single crystal diamond mechanical resonators

Single-crystal diamond (SCD) has the potential to boost microelectromechanical system (MEMS) with unprecedented performance in terms of its intrinsic mechanical, chemical, and electronic properties, especially in the applications under extreme conditions. On the basis of the analysis of the energy dissipation in diamond mechanical resonators, the authors report on the marked improvement of the quality factor of SCD-MEMS resonators. Ion implantation assisted lift-off technique (IAL) is utilized to fabricate the SCD resonators. The quality factor of the resonator fabricated from the ion-damaged SCD layer alone is as low as 100–300 owing to the bulk or surface defects. The growth of homoepitaxial layers on the ion-implanted SCD substrates significantly improves the quality factor by more than 100 times. Cantilevers made of SCD epilayers of different thicknesses are examined. It is found that the quality factor increases with increasing the epilayer thickness. The maximum quality factor of the SCD cantilevers fabricated by the IAL technique reaches 3.9 × 104. A bilayer model is proposed to describe the variation of the quality factor.