Thin-film resistance temperature detector array for the measurement of temperature distribution inside a phantom

A thin-film resistance temperature detector (RTD) array is proposed to measure the temperature distribution inside a phantom. HIFU (high-intensity focused ultrasound) is a non-invasive treatment method using focused ultrasound to heat up a localized region, so it is important to measure the temperature distribution without affecting the ultrasonic field and heat conduction. The present 25 µm thick PI (polyimide) film is transparent not only to an ultrasonic field, because its thickness is much smaller than the wavelength of ultrasound, but also to heat conduction, owing to its negligible thermal mass compared to the phantom. A total of 33 RTDs consisting of Pt resistors and interconnection lines were patterned on a PI substrate using MEMS (microelectromechanical systems) technology, and a polymer phantom was fabricated with the film at the center. The expanded uncertainty of the RTDs was 0.8 K. In the experimental study using a 1 MHz HIFU transducer, the maximum temperature inside the phantom was measured as 70.1 °C just after a HIFU excitation of 6.4 W for 180 s. The time responses of the RTDs at different positions also showed the residual heat transfer inside the phantom after HIFU excitation. HIFU results with the phantom showed that a thin-film RTD array can measure the temperature distribution inside a phantom.