抛光
电解
材料科学
等离子体
电流密度
冶金
化学机械平面化
电压
复合材料
电极
化学
电气工程
电解质
物理
物理化学
工程类
量子力学
作者
Ji Wang,Laichun Suo,Yili Fu,Lili Guan
标识
DOI:10.1109/icinfa.2012.6246913
摘要
Electrolysis and plasma polishing is a new technique that can replace the traditional polishing methods. Analysis on heat transfer process of electrolysis and plasma polishing is performed, from which it is discovered that the workpiece's surface heat flux density has a great effect on the material removal rate. Energy gains of the surface of metal workpieces are studied to come mainly from electron-bombardment. According to simplified mechanism of electrolysis and plasma polishing and the experimental validation, the material removal rate is direct proportion to the electric current density under steady state of polishing when the material of the workpiece and the voltage keep constant. Voltage, temperature and concentration of the polishing solution and the workpiece's diving depth in polishing solution are the important factors to influence the material removal rate.
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