天文干涉仪
半导体
谐振器
光学(聚焦)
硅
比例(比率)
波导管
半导体器件
计算机科学
点(几何)
绝缘体上的硅
光电子学
光学
工程物理
电子工程
材料科学
物理
工程类
干涉测量
纳米技术
量子力学
图层(电子)
几何学
数学
作者
Matteo Cherchi,Sami Ylinen,Mikko Harjanne,Markku Kapulainen,Tapani Vehmas,Timo Aalto
摘要
We present our recent breakthrough for high density integration in micron-scale thick semiconductor platforms. The novel bend concept is presented from a theoretical point of view and supported by experimental results on silicon strip waveguides, including the smallest low-loss bends ever reported for an optical waveguide. Some experimental example applications to resonators, spirals, and Mach-Zehnder interferometers are also presented, along with envisaged applications to other semiconductor platforms. A special focus will be dedicated to potential applications in III-V platforms, where the novel bend could lead to unprecedented dense integration of devices as well as to novel concepts for active components.
科研通智能强力驱动
Strongly Powered by AbleSci AI