Midwave infrared resonant cavity detectors with >70% quantum efficiency

We report resonant cavity infrared detectors with a peak wavelength of 4.54–4.58 μm that combine external quantum efficiency (EQE) exceeding 70% with spectral bandwidth 20–40 nm and ≤2% EQE at all non-resonance wavelengths between 4 and 5 μm. A 300-nm-thick absorber assures that most of the radiation propagating in the cavity produces photocurrent rather than parasitic loss. The cavity is formed by heterogeneously bonding a midwave infrared (MWIR) nBn detector chip to a GaAs/AlGaAs distributed Bragg reflector, etching away the GaSb substrate, forming mesas with diameter ≈100 μm, depositing a Ge spacer, and then depositing a single-period Ge-SiO2 top mirror. At all temperatures between 125 and 300 K, the responsivity at 150 mV bias exceeds 2.2 A/W and the EQE exceeds 61%. When the thermal background current for a realistic system scenario with f/4 optic that views a 300 K scene is derived from the observed EQE spectra, the resulting specific detectivity D* of 7.5 × 1012 cmHz½/W at 125 K operating temperature is 4.5 times higher than for a state-of-the-art broadband MWIR HgCdTe device. Simulations of the cavity performance indicate that EQE > 90% may be feasible following minimization of parasitic optical loss and maximization of the photocarrier collection efficiency. Potential applications include free space optical communication, chemical sensing, on-chip spectroscopy, and hyperspectral imaging.