Development and motion control of a symmetric high-precision 2-DOF linear piezoelectric platform

Abstract In the field of precision positioning and micro-manipulation, achieving high-precision motion with minimal hysteresis remains a significant challenge. In this paper, a symmetric high-precision 2-DOF linear piezoelectric platform (PEP) is proposed to address this issue. A single bonded-type piezoelectric actuator (PEA), utilizing fewer piezoelectric ceramic slices, drives the flexible stage to achieve two-dimensional motion with reduced hysteresis. The symmetric structural design eliminates long-term unbalanced loading, thereby enhancing mechanical stability. A hysteretic dynamics hybrid model of the PEP is established, and it is used to design the feedforward controller to achieve high accuracy. A prototype PEP has been fabricated for tests to verify its performances. The open-loop experiment results show that the proposed PEP has low hysteresis (7% hysteresis rate), high displacement resolution (3 nm), and can output ±9.7 μm × ±9.7 μm stroke. The closed-loop experimental results show that the repeated positioning precision of the PEP is ±6 nm, the hysteresis rate is 0.1%, and the relative trajectory tracking error is less than 0.07%. This work can broaden the application prospects of the PEP in precision positioning and micro-manipulation.