Evaporated contacts

Chapter Contents: 5.1 Metallization by means of physical vapour deposition 5.1.1 Deposition 5.1.2 Properties of PVD metal contacts 5.1.3 Structuring of PVD metallization 5.1.4 Conclusions 5.2 Transparent conducting oxides in crystalline solar cells 5.2.1 Transparent conducting oxides 5.2.2 Properties and characterization of TCOs 5.2.3 TCO materials for c-Si-based solar cells 5.2.4 Conclusions 5.3 Thin metal compound contact interlayers 5.3.1 Introduction 5.3.2 Materials 5.3.3 Deposition techniques for metal compound interlayers 5.3.4 Remaining challenges 5.4 Production tools for evaporation and sputtering TCOs 5.4.1 Prerequisites for mass-volume industrial equipment 5.4.2 Comparison of several deposition techniques and technologies 5.4.3 Essential metrics for a volume production equipment 5.4.4 Conclusions Acknowledgement References