电容器
匹配(统计)
航程(航空)
材料科学
电子工程
光电子学
电压
电气工程
工程类
数学
统计
复合材料
作者
H.P. Tuinhout,Adrie Zegers-van Duijnhoven,I. Brunets
标识
DOI:10.1109/icmts.2018.8383771
摘要
This paper presents a set of test structures that revealed a thus far unknown (or at least unreported) CMP-related short-range correlated mismatch fluctuation effect on the matching of backend metal fringe capacitors. It is shown that an apparent degradation of mismatch standard deviations at medium-range distances is in fact due to an improvement of matching for devices placed at very small distances.
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