Electron Injection and Avalanche during the Anodic Oxidation of Tantalum

The consequences of the avalanche‐breakdown model during the growth of anodic tantalum oxide in electrolytes are discussed. Typical values of the injected current density at the electrolyte‐oxide interface, the impact ionization coefficient, and the electric field during anodization have been determined from the anodization characteristics at a constant current. The results are interpreted assuming that the injected current has its origin in the electrolyte anions incorporated into the oxide during the anodization process.