Batch Fabrication of Shape Memory Actuated Polymer Microvalves by Transfer Bonding Techniques

Polymer based microvalves offer outstanding properties for biomedical and life science applications. They can be produced cost efficiently by batch fabrication methods. Further, by adapting the polymer material, custom-tailored properties of the valve are possible. For mechanically active microvalves, actuation with smart materials like shape memory alloys is highly attractive due to their high work output per volume and favorable scaling behavior. For the integration of such smart materials, fabrication process incompatibilities between the actuator material and the polymer target system need to be avoided. This can be achieved by novel transfer bonding technologies being optimized for batch fabrication. These technologies are demonstrated for polymer microvalves actuated by a shape memory alloy but they can also be applied to other functional materials and structures.