Strongly enhanced photon collection from diamond defect centers under microfabricated integrated solid immersion lenses

The efficiency of photon collection from optically active defect centers in bulk diamond is greatly reduced by refraction at the diamond-air interface. We report on the fabrication and measurement of a geometrical solution to the problem; integrated solid immersion lenses (SILs) etched directly into the surface of diamond. An increase of a factor of 10 was observed in the saturated count-rate from a single negatively charged nitrogen-vacancy (NV−) within a 5 μm diameter SIL compared with NV−’s under a planar surface in the same crystal. Such a system is potentially scalable and easily adaptable to other defect centers in bulk diamond.