Preparation and performance study of electroplated Ni–W/diamond ultrathin dicing blades

晶片切割 材料科学 钻石 冶金 电镀(地质) 复合材料 图层(电子) 地球物理学 地质学
作者
Lan Zhang,Hongyang Yu,Huizhong Ma
出处
期刊:Materials Science in Semiconductor Processing [Elsevier BV]
卷期号:175: 108280-108280
标识
DOI:10.1016/j.mssp.2024.108280
摘要

In this study, Ni–W/diamond ultrathin dicing blades with various tungsten contents were fabricated using a composite electrodeposition technique by adding different concentrations of sodium tungstate to a nickel sulfamate plating solution utilizing a self-developed cathodic autorotating plating apparatus. The results showed that the tungsten content in the dicing blades increased, the deposition rate accelerated, the distribution uniformity of the diamond particles improved, and the mechanical properties were noticeably enhanced with an increase in the sodium tungsten concentration in the plating solution. The performance of the dicing blade reached its peak at a sodium tungstate concentration of 6 g/L. At this point, the diamond content in the Ni–W/diamond dicing blade was higher and more uniformly distributed; the base metal of the dicing blade, a Ni–W alloy, increased in hardness by 47% and in Young's modulus by 26.8% when compared to Ni; the dicing blade's microhardness reached a maximum of 12.4 GPa, an increase of 49.4% over Ni/diamond dicing blades. The average friction coefficient and wear of the dicing blades decreased by 23.4% and 46.5% respectively. The cutting test results also showed that all aspects of the cutting performance of the dicing blade were greatly improved, with the deviation coefficient of Ni–W/diamond dicing blade decreased by 47.9% compared with that of the Ni/diamond dicing blade, the chipping size decreasing by 30.6%, and the radial wear reducing by 31.6%.

科研通智能强力驱动
Strongly Powered by AbleSci AI
科研通是完全免费的文献互助平台,具备全网最快的应助速度,最高的求助完成率。 对每一个文献求助,科研通都将尽心尽力,给求助人一个满意的交代。
实时播报
哈哈哈哈哈完成签到,获得积分10
2秒前
深情的雪糕完成签到 ,获得积分10
5秒前
000发布了新的文献求助10
6秒前
ZR1995完成签到,获得积分10
6秒前
xuhongfei发布了新的文献求助10
6秒前
7秒前
www发布了新的文献求助10
8秒前
啊啊啊完成签到 ,获得积分10
8秒前
8秒前
北听筠完成签到,获得积分10
9秒前
li完成签到,获得积分10
10秒前
wkh发布了新的文献求助10
10秒前
shiyi0709应助ZXR采纳,获得15
12秒前
健忘的无招完成签到,获得积分10
12秒前
13秒前
Kao应助nnl采纳,获得10
14秒前
peir完成签到,获得积分10
15秒前
saki发布了新的文献求助10
15秒前
16秒前
Spiner发布了新的文献求助10
18秒前
阿楠完成签到,获得积分10
18秒前
Spiner发布了新的文献求助10
18秒前
从嘉完成签到,获得积分10
19秒前
义气的熊猫完成签到,获得积分10
21秒前
荔枝完成签到,获得积分10
22秒前
陈曦发布了新的文献求助10
25秒前
XXXXXXX9发布了新的文献求助10
26秒前
lili完成签到 ,获得积分10
26秒前
平常傲玉发布了新的文献求助20
33秒前
comic发布了新的文献求助10
33秒前
任虎完成签到,获得积分10
36秒前
潇洒的惋清应助张志迪采纳,获得10
37秒前
冷傲的元霜完成签到,获得积分10
37秒前
39秒前
geewonii完成签到,获得积分10
40秒前
HaohaoLi发布了新的文献求助10
40秒前
小圆儿发布了新的文献求助10
40秒前
saki完成签到,获得积分20
40秒前
2052669099发布了新的文献求助30
43秒前
44秒前
高分求助中
Principles of Economics, 11th Edition 10000
University Physics with Modern Physics, 16th edition 10000
(应助此贴封号)【重要!!请各用户(尤其是新用户)详细阅读】【科研通的精品贴汇总】 10000
Gründe der Seele:Die Wiener Psychatrie im 20.Jahrhundert 1000
Development of a Bridge Weigh-In-Motion System: A technology to convert the bridge response to the passage of traffic into data on vehicle configurations, speeds, times of travel and weights 1000
Organic Reactions, Volume 116 1000
Current concepts in cutaneous toxicity : proceedings of the Fourth Conference on Cutaneous Toxicity, Washington, D.C., May 9-11, 1979 1000
热门求助领域 (近24小时)
化学 材料科学 医学 生物 纳米技术 工程类 有机化学 化学工程 生物化学 计算机科学 内科学 物理 复合材料 催化作用 细胞生物学 无机化学 光电子学 物理化学 电极 基因
热门帖子
关注 科研通微信公众号,转发送积分 7272937
求助须知:如何正确求助?哪些是违规求助? 8893967
关于积分的说明 18801992
捐赠科研通 6947282
什么是DOI,文献DOI怎么找? 3205122
关于科研通互助平台的介绍 2377090
邀请新用户注册赠送积分活动 2180299