材料科学
范德瓦尔斯力
二硫化钼
半导体
电介质
单层
场效应晶体管
栅极电介质
光电子学
薄脆饼
纳米技术
Crystal(编程语言)
晶体管
化学
复合材料
电压
有机化学
物理
量子力学
程序设计语言
计算机科学
分子
作者
Kailang Liu,Bao Jin,Wei Han,Xiang Chen,Penglai Gong,Li Huang,Yinghe Zhao,Li Liang,Sanjun Yang,Xiaozong Hu,Ji’an Duan,Lixin Liu,Fakun Wang,Fuwei Zhuge,Tianrui Zhai
标识
DOI:10.1038/s41928-021-00683-w
摘要
Van der Waals dielectrics, such as hexagonal boron nitride, are widely used to preserve the intrinsic properties of two-dimensional semiconductors in electronic devices. However, fabricating these materials on the wafer scale and integrating them with two-dimensional semiconductors is challenging because their synthesis typically requires mechanical exfoliation or vapour deposition processes. Here we show that a high-κ van der Waals dielectric can be created on wafer scales using an inorganic molecular crystal film of antimony trioxide (Sb2O3) fabricated via thermal evaporation deposition. Monolayer molybdenum disulfide (MoS2) field-effect transistors supported by this dielectric substrate exhibit enhanced electron mobility—from 26 cm2 V−1 s−1 to 145 cm2 V−1 s−1—and reduced transfer-curve hysteresis compared with when using SiO2 substrate. MoS2 transistors directly gated by the Sb2O3 film can operate with a supply voltage of 0.8 V, on/off ratio of 108 and subthreshold swing of 64 mV dec−1 at 300 K. Inorganic molecular crystal films of antimony trioxide can be fabricated using thermal evaporation deposition and used as a van der Waals dielectric in molybdenum disulfide field-effect transistors.
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