转印
光子学
实现(概率)
光子集成电路
硅光子学
集成电路
材料科学
聚二甲基硅氧烷
纳米技术
巨量平行
电子线路
薄脆饼
光电子学
激光器
计算机科学
电子工程
电气工程
工程类
物理
光学
复合材料
并行计算
统计
数学
作者
Jing Zhang,Grigorij Muliuk,Joan Juvert,Sulakshna Kumari,Jeroen Goyvaerts,Bahawal Haq,Camiel Op de Beeck,Bart Kuyken,Geert Morthier,Dries Van Thourhout,Roel Baets,Guy Lepage,Peter Verheyen,Joris Van Campenhout,Agnieszka Gocalińska,James O’Callaghan,E. Pelucchi,Kevin Thomas,Brian Corbett,António José Trindade
出处
期刊:APL photonics
[AIP Publishing]
日期:2019-11-01
卷期号:4 (11)
被引量:140
摘要
Silicon photonics (SiPh) enables compact photonic integrated circuits (PICs), showing superior performance for a wide variety of applications. Various optical functions have been demonstrated on this platform that allows for complex and powerful PICs. Nevertheless, laser source integration technologies are not yet as mature, hampering the further cost reduction of the eventual Si photonic systems-on-chip and impeding the expansion of this platform to a broader range of applications. Here, we discuss a promising technology, micro-transfer-printing (μTP), for the realization of III-V-on-Si PICs. By employing a polydimethylsiloxane elastomeric stamp, the integration of III-V devices can be realized in a massively parallel manner on a wafer without substantial modifications to the SiPh process flow, leading to a significant cost reduction of the resulting III-V-on-Si PICs. This paper summarizes some of the recent developments in the use of μTP technology for realizing the integration of III-V photodiodes and lasers on Si PICs.
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