Microstructure evolution in carbon-ion implanted sapphire

材料科学 蓝宝石 离子注入 纳米团簇 纳米金刚石 碳纤维 透射电子显微镜 钻石 分析化学(期刊) 离子 微观结构 纳米技术 复合材料 光电子学 光学 化学 有机化学 激光器 物理 复合数 色谱法
作者
J. O. Orwa,J. L. Peng,Jeffrey C. McCallum,David N. Jamieson,Sergey Rubanov,Steven Prawer
出处
期刊:Journal of Applied Physics [American Institute of Physics]
卷期号:107 (2) 被引量:4
标识
DOI:10.1063/1.3284963
摘要

Carbon ions of MeV energy were implanted into sapphire to fluences of 1×1017 or 2×1017cm−2 and thermally annealed in forming gas (4% H in Ar) for 1h. Secondary ion mass spectroscopy results obtained from the lower dose implant showed retention of implanted carbon and accumulation of H near the end of range in the C implanted and annealed sample. Three distinct regions were identified by transmission electron microscopy of the implanted region in the higher dose implant. First, in the near surface region, was a low damage region (L1) composed of crystalline sapphire and a high density of plateletlike defects. Underneath this was a thin, highly damaged and amorphized region (L2) near the end of range in which a mixture of i-carbon and nanodiamond phases are present. Finally, there was a pristine, undamaged sapphire region (L3) beyond the end of range. In the annealed sample some evidence of the presence of diamond nanoclusters was found deep within the implanted layer near the projected range of the C ions. These results are compared with our previous work on carbon implanted quartz in which nanodiamond phases were formed only a few tens of nanometers from the surface, a considerable distance from the projected range of the ions, suggesting that significant out diffusion of the implanted carbon had occurred.

科研通智能强力驱动
Strongly Powered by AbleSci AI
更新
PDF的下载单位、IP信息已删除 (2025-6-4)

科研通是完全免费的文献互助平台,具备全网最快的应助速度,最高的求助完成率。 对每一个文献求助,科研通都将尽心尽力,给求助人一个满意的交代。
实时播报
WuYiHHH完成签到,获得积分10
1秒前
qwe123完成签到,获得积分10
1秒前
小玉完成签到,获得积分10
1秒前
2秒前
2秒前
Lucas应助micaixing2006采纳,获得10
3秒前
孙燕应助青青子衿采纳,获得10
3秒前
素衣完成签到,获得积分10
3秒前
4秒前
5秒前
小居同学完成签到,获得积分10
5秒前
6秒前
6秒前
舒适沛儿发布了新的文献求助10
7秒前
拉长的问晴完成签到,获得积分10
7秒前
8秒前
充电宝应助五十采纳,获得10
8秒前
8秒前
呢咕啦嘶嘚咕啦完成签到,获得积分20
9秒前
Nico应助宇文天思采纳,获得10
9秒前
ttylylyl发布了新的文献求助10
9秒前
10秒前
star完成签到,获得积分10
10秒前
11秒前
jh发布了新的文献求助20
11秒前
11秒前
顺顺发布了新的文献求助10
11秒前
孙燕应助Rixxed采纳,获得10
11秒前
研友_85YJY8发布了新的文献求助10
11秒前
temaxs发布了新的文献求助10
12秒前
打卡下班应助niu采纳,获得10
12秒前
传奇3应助大尾巴白采纳,获得10
13秒前
Qingwenxin发布了新的文献求助10
13秒前
今后应助大尾巴白采纳,获得10
13秒前
ding应助大尾巴白采纳,获得10
13秒前
bkagyin应助大尾巴白采纳,获得10
13秒前
顾矜应助大尾巴白采纳,获得10
13秒前
13秒前
14秒前
Starlight发布了新的文献求助10
14秒前
高分求助中
【重要!!请各位用户详细阅读此贴】科研通的精品贴汇总(请勿应助) 10000
Genomic signature of non-random mating in human complex traits 2000
Semantics for Latin: An Introduction 1155
Plutonium Handbook 1000
Three plays : drama 1000
Robot-supported joining of reinforcement textiles with one-sided sewing heads 640
北师大毕业论文 基于可调谐半导体激光吸收光谱技术泄漏气体检测系统的研究 530
热门求助领域 (近24小时)
化学 材料科学 医学 生物 工程类 有机化学 生物化学 物理 内科学 纳米技术 计算机科学 化学工程 复合材料 遗传学 基因 物理化学 催化作用 冶金 细胞生物学 免疫学
热门帖子
关注 科研通微信公众号,转发送积分 4108273
求助须知:如何正确求助?哪些是违规求助? 3646389
关于积分的说明 11550347
捐赠科研通 3352356
什么是DOI,文献DOI怎么找? 1842043
邀请新用户注册赠送积分活动 908372
科研通“疑难数据库(出版商)”最低求助积分说明 825490