Application of hydrogel-coated microcantilevers as sensing elements for pH

This note reports on cantilever-based sensor elements coated with a hydrogel. The hydrogel responds with a volume change on varying the pH value of surrounding liquids. The change in volume leads to a static deflection of the cantilevers, which is detected using integrated piezoresistors. To increase deflection sensitivity of the sensor elements, sub-micron, multilayered cantilevers consisting of polycrystalline silicon and silicon oxide are used. A new cantilever design is developed, which decreases the cantilever sensitivity to in situ stresses and thermal bimorph effects. A theoretical model for the sensor elements is introduced providing the output signal of multiple cantilevers connected in a full Wheatstone bridge. Measurements of deflection sensitivity prove the theoretical model. Finally, the cantilevers are coated with a 2-hydroxyethyl methacrylate and 2-(dimethylamino) ethyl methacrylate copolymer-based hydrogel, and changes in the pH value from pH 4 to pH 10 are measured.