铜
拉曼光谱
氯化铜
氯
无水的
拉曼散射
分析化学(期刊)
氯化物
薄膜
化学
光谱学
激光器
无机化学
材料科学
冶金
光学
纳米技术
物理
有机化学
色谱法
量子力学
作者
Hua Tang,Irving P. Herman
出处
期刊:Journal of vacuum science & technology
[American Vacuum Society]
日期:1990-05-01
卷期号:8 (3): 1608-1617
被引量:13
摘要
The reactions of copper films on glass with chlorine are studied at room temperature with and without a focused laser (4880 Å) present for localized heating. Raman scattering is used to follow the transformation of the copper film in situ to the copper chlorides, CuCl and CuCl2. At room temperature, a thin film forms on top of partially passivated copper with chlorine present, which is identified to be CuCl by Raman spectroscopy at 77 K. This copper chloride film is locally desorbed by laser heating in vacuum. Deposition-like features are produced on passivated Cu films and CuCl-on-Cu films by laser heating with Cl2 present. Raman spectroscopy shows that these features are CuCl2, with CuCl sometimes also present. After the copper chloride is removed, ∼4 μm wide etched features remain in the copper film. The Raman spectrum of anhydrous CuCl2 presented here is apparently the first such measurement.
科研通智能强力驱动
Strongly Powered by AbleSci AI