Development of multi-physical properties comprehensive measurement system for micro/nanoscale filamentary materials

The properties of micro/nanoscale filamentary materials are significantly different from bulk. They have wide applications in MEMS/NEMS sensors and micro/nano electrical devices. As the measurement methods for bulk materials are difficult to be applied on nanoscale filamentary materials, development of the precise measurement method and technology for micro/nanoscale filamentary materials has been attracting intense interest. This paper developed a highly integrated measurement system for comprehensively measuring the thermophysical, electrical and thermoelectric properties of micro/nanoscale filamentary materials from 40 K to 500 K, including electrical conductivity, temperature coefficient of resistance, thermal conductivity, thermal diffusivity, thermal effusivity, specific heat, Seebeck coefficient and the figure of merit. A detailed uncertainty analysis has been evaluated and Platinum wire (99.95%) and constantan wire (60% Cu 40% Ni) have been measured and compared with reference values to verify the accuracy of the measurement system. Development of the present system is expected to fill the international gaps in development of multi-physical properties comprehensive measurement system for nanoscale filamentary materials.