Performance optimization of large stroke flexure hinges for high stiffness and eigenfrequency

Two flexure hinge types are optimized for high support stiffness and high first unwanted eigenfrequency for two different working ranges, ±5.7° and ±20°. We show how multiple performance specifications lead to different designs with different performance. The optimization uses efficient parameterized non-linear beam-based models. The constraints and load case are taken from an electron microscopy use case. Optimization results show that the Three Flexure Cross Hinge has the highest first unwanted eigenfrequencies, while the new Infinity Flexure Hinge shows highest support stiffnesses. The design of the optimal geometry is detailed such that a prototype mechanism is manufactured and tested. Experiments show that the first unwanted eigenfrequency is 35 times higher than the first eigenfrequency throughout the working range.