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1150 积分 2025-05-20 加入
Experimental evidence of various mode numbers of azimuthal waves in an E × B Penning source for semiconductor processing
1个月前
已完结
Azimuthal and axial dispersion relations of low-frequency oscillations in partially magnetized plasma with crossed electric and magnetic fields
1个月前
已关闭
Increasing bushing temperature via a heating tube for performance enhancement of ion implanters
1个月前
已完结
Increasing bushing temperature via a heating tube for performance enhancement of ion implanters
2个月前
已完结
Investigation of various source materials and co-gases for fluorine ion implantation performance improvement
2个月前
已完结
Investigation of source materials, co-gases, and methods for aluminum ion implantation
2个月前
已完结
Introducing the Purion H200™ single wafer high current implanter
5个月前
已完结
IMPHEAT-II: A novel ion source with extended lifetime and wide beam current dynamic range for SiC power device mass production
5个月前
已完结
35 Years of challenge and innovation in ion implant
6个月前
已完结
Ion and Plasma Sources: Basic Science and Recent Trends
6个月前
已完结
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