Lv11
8 积分 2025-09-22 加入
Research progress of CeO2-based polishing slurry in SiC-CMP
2小时前
待确认
Investigation on Electrical Enhanced Photocatalysis Polishing of Single-Crystal Silicon Carbide Substrates
2小时前
已完结
Effects of process parameter variations on the removal rate in chemical mechanical polishing of 4H-SiC
4小时前
已完结
Chemical mechanical polishing (CMP) of on-axis Si-face 6H-SiC wafer for obtaining atomically flat defect-free surface
4小时前
已完结
Study on Enhancement Mechanisms in Ultrasonic-Assisted Plasma Electrochemical Oxidation for SiC Single Crystal
4小时前
已完结
Study of surface quality during picosecond laser ablation–assisted grinding of C-face and Si-face of 4H-SiC crystals
1个月前
已完结
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