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Interaction of W(CO)6 with SiO2 surfaces: A density functional study
1个月前
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Interaction of W(CO)6 with SiO2 surfaces: A density functional study
1个月前
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Chemical vapour deposition of tungsten films for metallization of integrated circuits
1个月前
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Properties of low-resistivity molybdenum metal thin film deposited by atomic layer deposition using MoO2Cl2 as precursor
1个月前
已完结
Some Insights into Atomic Layer Deposition of MoNx Using Mo(CO)6 and NH3 and Its Diffusion Barrier Application
1个月前
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