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468 积分 2025-05-12 加入
Analysis of Heterostructure Formation of Abnormally Oriented Grains in Sputter-Deposited AlScN Films and Its Impact on Bulk Acoustic Wave Devices
7天前
已完结
Large Built‐in Fields and Tunable Ferroelectricity in Composition‐Graded ScAlN Thin Films Deposited by Reactive Sputtering
8天前
已完结
Control of Abnormally Oriented Grains (AOG) in AlxSc1–xN Bimorph Stack and Characterization of Piezoelectric Properties on an 8-in Wafer
8天前
已完结
Impact of negative bias on the piezoelectric properties through the incidence of abnormal oriented grains in Al0.62Sc0.38N thin films
8天前
已完结
CMOS compatible metal stacks for suppression of secondary grains in Sc0.125Al0.875N
8天前
已完结
Identifying and overcoming the interface originating c-axis instability in highly Sc enhanced AlN for piezoelectric micro-electromechanical systems
8天前
已完结
Thickness scaling down to 5 nm of ferroelectric ScAlN on CMOS compatible molybdenum grown by molecular beam epitaxy
13天前
已完结
Understanding Ion Implantation Defect Distributions in Silicon Induced by FIB and Other Ion Sources Using Advanced STEM
14天前
已完结
Reliable endpoint technique on Si trenching for backside circuit edit
14天前
已完结
Electrical Characterization of Circuit Edit Workflow using High and Low Energy FIB
14天前
已关闭