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154 积分 2026-07-10 加入
Co-packaged optics for high-performance computing and artificial intelligence
13小时前
已完结
Precision etching process optimization and mechanism investigation for ultrathin Al2O3 thin films at the bottom of trenches
25天前
已完结
Reversible SiO2/SiNx selectivity enabled by trimethylaluminum-assisted SF6 remote plasma etching
1个月前
已完结
Cryogenic Etching for High-Aspect Ratio Patterning: Recent Advancements and Future Prospects
1个月前
已完结
Electron-kinetic reactor engineering for damage-free, high-selectivity plasma etching
1个月前
已完结
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