Lv1
40 积分 2025-07-16 加入
High aspect ratio silicon etch: A review
1个月前
已完结
Development and transferability of neural-network models for plasma-surface interactions
3个月前
已关闭
A model for etching of three-dimensional high aspect ratio silicon structures in pulsed inductively coupled plasmas
5个月前
已完结
Measurements of F*, CF, and CF2 formation and decay in pulsed fluorocarbon discharges
5个月前
已完结
Plasma etching: Yesterday, today, and tomorrow
6个月前
已完结
Sequence modeling for predicting three-dimensional plasma etching profiles with deep learning
7个月前
已完结
Optimizing Plasma Etching: Integrating Precise Three-Dimensional Etching Simulation and Machine Learning for Multi-Objective Optimization
7个月前
已关闭
Attention-enhanced conditional variational autoencoder integrating 3D plasma etching simulation for etching process optimization
7个月前
已完结
皖公网安备34019202002308
