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30 积分 2025-07-16 加入
A model for etching of three-dimensional high aspect ratio silicon structures in pulsed inductively coupled plasmas
6小时前
已完结
Measurements of F*, CF, and CF2 formation and decay in pulsed fluorocarbon discharges
18天前
已完结
Plasma etching: Yesterday, today, and tomorrow
1个月前
已完结
Sequence modeling for predicting three-dimensional plasma etching profiles with deep learning
2个月前
已完结
Optimizing Plasma Etching: Integrating Precise Three-Dimensional Etching Simulation and Machine Learning for Multi-Objective Optimization
2个月前
已关闭
Attention-enhanced conditional variational autoencoder integrating 3D plasma etching simulation for etching process optimization
2个月前
已完结
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