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58 积分 2026-07-20 加入
HeteroM-ILT: hybrid CNN and state space model for high-fidelity mask optimization
6天前
已完结
Improving asymmetric printing and low margin using custom illumination for contact hole lithography
9天前
已完结
Fast full chip curvilinear MRC for advanced manufacturing nodes
15天前
已完结
Model-driven convolution neural network for inverse lithography
23天前
已完结
Efficient exposure of non-Manhattan layouts for optical applications using variable shaped beam lithography
1个月前
已完结
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