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2680 积分 2024-07-15 加入
Inductively coupled plasma etching of silicon carbide: a review
7天前
已完结
Vertical sidewall of silicon nitride mask and smooth surface of etched-silicon simultaneously obtained using CHF3/O2 inductively coupled plasma
1个月前
已完结
Cryogenic plasma etching for SiO2/SiN dielectric films: a mini review
1个月前
已完结
Thermal Isotropic Atomic Layer Etching of Metallic Molybdenum
1个月前
已关闭
Vertical and Horizontal Profile Control in STI Etch
2个月前
已完结
Simulation-Driven Optimization of STI Etching: A Systematic Approach to Defect Reduction
2个月前
已完结
The Mechanism of an Etching-Back to Reduce the Density of Cone Defect in STI During the Manufacturing
2个月前
已完结
Optimizing Photoresist Strip to reduce fluorine outgassing causing bubble defect
2个月前
已完结
A Novel Si Nanosheet Channel Release Process for the Fabrication of Gate-All-Around Transistors and Its Mechanism Investigation
2个月前
已完结
Study of selective isotropic etching effects of Si1-xGex in gate-all-around nanosheet transistor process
2个月前
已完结
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