Lv22
196 积分 2024-12-19 加入
Suppression of the standing wave effect in high frequency capacitive discharges using a shaped electrode and a dielectric lens: Self-consistent approach
12小时前
待确认
Improving plasma uniformity using lens-shaped electrodes in a large area very high frequency reactor
12小时前
待确认
Characterization of the ion angle distribution function in low-pressure plasmas using a micro-electromechanical system
1个月前
已关闭
One-dimensional particle-in-cell/Monte Carlo collision simulation for investigation of amplitude modulation effects in RF capacitive discharges
1个月前
已完结
Driving frequency effect on discharge parameters and higher harmonic generation in capacitive discharges at constant power densities
1个月前
已完结
Characteristics of SiO2 etching by using pulse-time modulation in 60 MHz/2 MHz dual-frequency capacitive coupled plasma
6个月前
已完结
Contribution of Ion Energy and Flux on High-Aspect Ratio SiO2 Etching Characteristics in a Dual-Frequency Capacitively Coupled Ar/C4F8 Plasma: Individual Ion Energy and Flux Controlled
6个月前
已完结
Control of the discharge chemistry of CHF3 in dual-frequency capacitively coupled plasmas
6个月前
已完结
Contact Edge Roughness In The Etching Of High Aspect Ratio Contacts In Sio2
6个月前
已完结
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