Lv41
680 积分 2025-09-15 加入
Thermal and stress analysis of semiconductor wafers in a rapid thermal processing oven
1个月前
已完结
Transient heat transfer in batch thermal reactors for silicon wafer processing
1个月前
已完结
Modeling and simulation of plasma etching reactors for microelectronics
1个月前
已关闭
Temperature Distribution and Stresses in Circular Wafers in a Row During Radiative Cooling
1个月前
已完结
Two-dimensional thermal oxidation of silicon. II. Modeling stress effects in wet oxides
1个月前
已完结
Two-dimensional thermal oxidation of silicon—I. Experiments
1个月前
已完结
Modeling of three-dimensional effects on temperature uniformity in rapid thermal processing of eight inch wafers
1个月前
已完结
Thermal Uniformity Enhancement in Vertical Diffusion Furnaces Using MonteCarlo-Guided Finite Element Modeling
2个月前
已完结
General Relationship for the Thermal Oxidation of Silicon
2个月前
已完结
Physics- Informed Neural Network Approach for Numeric Modeling of Rapid Thermal Processing System
2个月前
已完结
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