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Optimization of ion energy distribution and ion angular distribution by tuning chamber radius in inductively coupled plasma etching
23小时前
已完结
Three-dimensional inhomogeneous characteristics of low-frequency plasma oscillations in wall-less Hall thrusters
23小时前
求助中
Simulation and experimental verification of radio frequency plasma discharge parameters in a MEOP system at the CSNS
23小时前
待确认
Simulation of electromagnetic wave–plasma interactions in ellipsoidal inductively coupled plasma
23小时前
已完结
Voltage waveform control of an embedded focus ring electrode to improve edge plasma uniformity and ion incidence angle in capacitively coupled RF discharges
23小时前
已完结
N 2 capacitively coupled plasma—moment analysis of particle-in-cell modeling results
23小时前
待确认
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